WAFER MARKER
Contribution for improving traceability of semiconductor manufacturing process
Wafer Marker SL473 Series
Wide products lineup not only for the marking on Si, GaAs wafer, but also for SiC, GaN, other wafer. Contribution for improving traceability of semiconductor manufacturing process with wide products line up for various wafer material, size, and production capacity
FEATURE
Stable marking with good visibility
Stable marking with good visibility by suitable laser oscillator for target wafer materials and the automated laser-power compensation function
Easy operation with high versatility
Easy operation changing recipes for marking on various different wafer sizes and materials.
(Option: Multiple wafer size, reverse-side marking)
Extensive options and expandability
Online communication protocol, Wafer ID reader, Marking inspection function, Dust collector unit
300 mm Wafer Model
SL473GS Series
Equipped with Nd: YAG-SHG laser with extremely high absorption rate into Si
APPLICATION
Soft marking for 300 mm Si wafer
MAIN SPECIFICATION
| Model | SL473GS Series |
|---|---|
| Laser Type | Nd: YAG-SHG laser Wavelength: 532 nm |
| Number of port for Carrier | 1 or 2 |
| Wafer Size | 12 inch |
| Dimensions [mm] (*1) | Approx. 1,640 (W) x 1,920 (D) x 1,550 (H) mm |
| Weight(Main body) | Approx. 1,000 kg |
- (*1) It does not include protrusions
