WAFER MARKER
Contribution for improving traceability of semiconductor manufacturing process
Wafer Marker SL473 Series
Wide products lineup not only for the marking on Si, GaAs wafer, but also for SiC, GaN, other wafer. Contribution for improving traceability of semiconductor manufacturing process with wide products line up for various wafer material, size, and production capacity
FEATURE
Stable marking with good visibility
Stable marking with good visibility by suitable laser oscillator for target wafer materials and the automated laser-power compensation function
Easy operation with high versatility
Easy operation changing recipes for marking on various different wafer sizes and materials.
(Option: Multiple wafer size, reverse-side marking)
Extensive options and expandability
Online communication protocol, Wafer ID reader, Marking inspection function, Dust collector unit
Standard Model
SL473DS / DT Series
Standard Model for 1 port
APPLICATION
SL473DS Series: Soft marking for Si wafer, GaAs and InP wafer
SL473DT Series: SiC, GaN wafer and above mentioned wafer
MAIN SPECIFICATION
| Model | SL473DS Series | SL473DT Series |
|---|---|---|
| Laser Type | Nd: YAG-SHG laser Wavelength: 532 nm |
Nd: YLF-THG laser Wavelength: 349 nm |
| Number of port for Carrier | 1 | |
| Wafer Size | 4, 5, 6, 8 Inch each (Option: 2, 3 inches, multiple size) |
|
| Dimensions [mm] (*1) | 1,100 (W) x 1,500 (D) x 1,505 (H) ㎜ | |
| Weight(Main body) | Approx. 650 kg | |
- (*1) It does not include protrusions
